IMA & PIMS Mathematical Modeling in Industry Workshop XVIII Team 3 Final Report: Fast Calculation of Diffraction by Photomasks
نویسندگان
چکیده
4 Finite Difference Frequency Domain 7 4.1 Forcing Term Expressed as Deviation from a Background . . . . . . . . . . . . . . . 7 4.2 Setting up FDFD Equations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 4.3 Electric Field FDFD Equation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 4.4 Magnetic Field FDFD Equation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 4.5 First-Order FDFD Equation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 4.6 Performance of the Perfectly Matched Layer . . . . . . . . . . . . . . . . . . . . . . . 9 4.7 Condition Number of Equations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
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